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    昆山瑞塞奇精密儀器有限公司
    電話:15001723735 (徐先生)
    網址:www.hi339.com
    公司郵箱:research@resemtech.com
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    深圳瑞塞奇精密儀器有限公司

    公司地址:廣東省深圳市寶安區航城街道奮達高新科技園A棟408室

    E-mail: research@resemtech.com

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    SU1510
    SU1510
    產品概述:
    Standard specifications(1) BasicspecificationsSE image resolution : 3.0 nm at 30 kV(x100,000, WD = 5 mm, High Vacuum Mode)15 nm at 3 kV ( x30,000, WD = 5 mm, Hi…
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    詳細介紹

    SU1510

    Standard specifications

     

    (1)  Basicspecifications

    SE image resolution   : 3.0 nm at 30 kV(x100,000, WD = 5 mm, High Vacuum Mode)
    15 nm at 3 kV ( x30,000, WD = 5 mm, High Vacuum Mode)

    BSE image resolution  : 4.0 nm at 30 kV ( x60,000, WD = 5 mm, 6 Pa in Low Vacuum Mode )

    Magnification         : ′5– 300,000
    (Highest and lowest magnifications are dependent upon accelerating voltage, WDand scan speed)

     

    (2)  ElectronOptics

    Electron beam source  : Pre-centered Cartridge filament ( Tungsten hair-pin filament)

    Accelerating voltage  : 0.3 kV – 30 kV

    Gun bias              :Quadrant Bias

    Beam alignment        : 2-stage electromagnetic deflection (works as beam blankingwhen an image is freezed)

    Lens system           :3-stage electromagnetic lens reduction optics

    Stigmator             :X-Y octopole electromagnetic

    Scanning coil         : 2-stage electromagnetic deflection

    Objective movable aperture: 4 holes withclick-stop design (30, 50, 80, 150 μm dia.)

    Image shift           :±50 μm or larger at WD = 15 mm

    Analysis position     : WD = 15 mm, TOA = 35°

    Detectors             :SE detector in High vacuum mode
    BSE detector in high and low vacuum modes

     


    (3)  Specimenstage

     

    X

    0 – 80 mm

    Y

    0 – 40 mm

    Z

    5 – 50 mm

    R

    360°

    T

    -20° - +90°

    Control

    5-axis manual

    Maximum size

    153 mm in diameter

    Observable area

    126 mm dia. with XYR

    Maximum height

    60 mm at WD = 15 mm

    Others

    2-axis stage Motor drive unit (option)

     

    (4)  Evacuationsystem

    Evacuation control    : Fully automatic sequence with motor valves

    Vacuum gauge          : Pirani gauge

    Ultimate vacuum       : 1.5 x 10-3 Pa

    Adjustable pressure range: 6 – 270 Pa (inlow vacuum mode only)

    Vacuum pump           :Turbo Molecular Pump(TMP) 210 l/s, 1 Oil Rotary Pump 135 l/min.(50Hz), 162 l/min.(60Hz),  1

     

     

    (5)  Display

    Control               :Graphic User Interface(GUI), English menu

    OS                    :Microsoft® Windows® XP Professional

    Operation             :Mouse/Keyboard, Rotary knob set(option)

    Monitor               :19 type LCD (1280 1024 pixels on desk top)

    Image display mode    : Full screen display (1280 ′ 960 pixels)
    Standard display (640
    ′480 pixels)
    Dual image display (640 ′480 pixels 2), Signal mixing

    Scanning mode         : TV/FAST

                          :Slow

                          :Reduced area (320 240 pixels)

                          :Waveform

                          :Split screen/Dual magnification

                          :High definition image capture (max. 2560 ′ 1920 pixels)

                          :Frame integration image capture (max. 2560 ′ 1920 pixels)


    Scanning speed        : TV scan
    (640 480 pixels, 25/30* frames/sec.)

                          :FAST scan
    (full screen display: 6.3/7.5* frames/sec.)

                          :Slow scan
    (full screen display: 1, 4, 20/16, 40/32, 80/64* sec./frame)
    (640 480 pixels: 0.5, 2, 10/8, 20/16, 40/32*sec./frame)

                          :Reduced area scan
    (320 240 pixels: 25/30,3/4* frame/sec.)
    * Frequency of power supply: 50/60Hz

    Automatic adjustment functions

                          :Automatic Brightness & Contrast (ABCC)

                          :Automatic Focus Control (AFC)

                          :Automatic Stigmator & Focus (ASF)

                          :Automatic Filament Saturation (AFS)

                          :Automatic Beam Alignment (ABA)

                          :Automatic Beam Setting (ABS)
    (AFS + ABA + Automatic Gun Bias) 

    Signal and image processing functions

                          :Improving S/N ratio by averaging (TV, FAST scan)

                          :Improving S/N ratio by pixel integration

                          :Improving S/N ratio by frame integration
    (maximum frames for integration: 1024)(TV, FAST, SLOW1)

                          :Composite bi-color image display
    (Real time on dual image display mode/Save image)

                          :Pseudo color display(Save image)

                          :Real time image processing
    (Reversed contrast, Gamma control)

                          :Real time histogram display

                          :Image processing for save image
    (Reversed contrast, Gamma control, Smoothing, Edge enhancement, etc.)

    Image saving          : Image saving size
    (640 480 pixels, 1280 ′ 960 pixels, 2560 ′1920 pixels, 5120 3840 pixels)

                          :Image filing format: BMP, TIFF, JPEG

    Image print out       : Free layout print function in standard


    Management of save image

                          :SEM data manager (Image data base) in standard
    (Data management, Thumbnail display, various image processing functions)

    Other functions       : Beam blanking when an image is frozen.

                          :Raster rotation

                          :Dynamic focus/Tilt compensation

                          :Data display (Image number, Accelerating voltage, Magnification, Micron marker,Unit, WD, Date, Time, Pressure, Detector)
    Data display selectable between with and without image

                          :Data entry[Figures (circle, rectangular, arrow, measurement line),characters

                          :Easy measurement function (distance between 2 points, and measurement lineswith arrow)

                          :3D Animation Maintenance Guide

                          :Image transfer to Quartz Imaging PCI

    X-Ray mode function   : Input signal terminals for X-Ray Rate-meter(0 - +10V) andMapping(TTL)

                          :Scanning mode (Line analysis, Spot analysis, Average concentration analysis)

                          :DBC interface (option)

    Connection port for external equipment

                          :USB interface

                          :Network interface (Ethernet), Setting up is at option.

    VTR signal            :NTSC black and white signal only(BNC), an image in standard display mode only.

     

    (6)    Safety device

                          :Protected against power failure, leakage current and vacuum failure.

     

    (7)  Dimensionand weight

     

    Item

    Dimension

    Weight

    Main unit

    550(W) x 1000(D) x 1460(H) mm

    380 kg

    Oil rotary pump

    526(W) x 225(D) x 306(H) mm

    28 kg

    Weight

    200(W) x 180(D) x 160(H) mm

    40 kg


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